Ribisi married actress Mariah O'Brien in 1997 and together they have one daughter, Lucia. The couple divorced in 2001. In 2007, he began a relationship with indie rock singer-songwriter Chan Marshall. The couple lived together for five years before ending their relationship in 2012. Ribisi married English model Agyness Deyn on June 16, 2012, and filed for divorce in January 2015.